{"id":1861,"date":"2022-10-25T09:58:32","date_gmt":"2022-10-25T09:58:32","guid":{"rendered":"https:\/\/rfidunion.com\/?p=1861"},"modified":"2023-04-17T08:41:39","modified_gmt":"2023-04-17T08:41:39","slug":"inertial-sensors-and-their-applications","status":"publish","type":"post","link":"https:\/\/rfidunion.com\/ko\/technology\/inertial-sensors-and-their-applications.html","title":{"rendered":"\uad00\uc131 \uc13c\uc11c \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc774\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c?"},"content":{"rendered":"
\uad00\uc131 \uc13c\uc11c\ub294 \ub9ce\uc740 \ucd5c\uc2e0 \uc7a5\uce58\uc758 \ud544\uc218 \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4. \uac00\uc18d\ub3c4, \ubc29\ud5a5 \ubc0f \uac01\uc18d\ub3c4\ub97c \uce21\uc815\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\uac83\ub4e4 \uc13c\uc11c<\/a> \ud56d\uacf5 \uc6b0\uc8fc, \ub85c\ubd07 \uacf5\ud559 \ubc0f \uc790\uc728 \uc8fc\ud589 \ucc28\ub7c9\uacfc \uac19\uc774 \uc815\ud655\ud55c \uc704\uce58 \uc9c0\uc815 \ub610\ub294 \uc774\ub3d9 \ucd94\uc801\uc774 \ud544\uc694\ud55c \uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8\uc5d0 \ud2b9\ud788 \uc720\uc6a9\ud569\ub2c8\ub2e4. \uae30\uc220 \ubc1c\uc804\uc73c\ub85c \uad00\uc131 \uc13c\uc11c\ub294 \ub354 \uc791\uace0 \uc815\ud655\ud558\uba70 \uc800\ub834\ud574\uc84c\uc2b5\ub2c8\ub2e4. \uc774 \ube14\ub85c\uadf8 \uac8c\uc2dc\ubb3c\uc5d0\uc11c\ub294 \uad00\uc131 \uc13c\uc11c, \uc5b4\uc148\ube14\ub9ac, \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ubc0f \ud5a5\ud6c4 \ub3d9\ud5a5\uc744 \uac1c\uad04\uc801\uc73c\ub85c \uc124\uba85\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \uad00\uc131 \uc13c\uc11c\ub294 \ubb3c\uccb4\uc758 \uac00\uc18d\ub3c4, \uae30\uc6b8\uae30, \uc9c4\ub3d9\uc744 \uac10\uc9c0\ud558\uace0 \uce21\uc815\ud569\ub2c8\ub2e4. <\/strong>\uad00\uc131\ub825\uc744 \uce21\uc815 \uac00\ub2a5\ud55c \uc804\uae30 \uc2e0\ud638\ub85c \ubcc0\ud658\ud569\ub2c8\ub2e4. \ud765\ubbf8\ub86d\uace0 \uc720\uc6a9\ud55c \ub2a5\ub825\uc785\ub2c8\ub2e4. \ub0b4\ube44\uac8c\uc774\uc158, \ubc29\ud5a5 \ubc0f \ubaa8\uc158 \uce90\ub9ac\uc5b4 \uc81c\uc5b4\ub97c \ud574\uacb0\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4. \uad00\uc131 \uc13c\uc11c \ubd80\ud488\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uac00\uc18d\ub3c4\uacc4\uc640 \uac01\uc18d\ub3c4 \uc13c\uc11c(\uc790\uc774\ub85c)\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \ub2e8\uc77c, \uc774\uc911 \ubc0f 3\ucd95 \uc870\ud569 IMU \ubc0f AHRS\ub294 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n MEMS \uad00\uc131 \uc13c\uc11c\ub97c \uc0dd\uc0b0\ud560 \uc218 \uc788\ub294 \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc774 \uac00\ub2a5\ud574\uc84c\uc2b5\ub2c8\ub2e4. \uc774 \uae30\uc220\uc740 \ub2e8\uacb0\uc815 \uc2e4\ub9ac\ucf58 \uc13c\uc11c \uc18c\uc790\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc0dd\uc0b0\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub807\uac8c \uc0dd\uc0b0\ub41c \ubbf8\ud06c\ub860 \uc218\uc900\uc758 \uc13c\uc11c\ub294 \uac70\uc758 \ubaa8\ub4e0 \uc8fc\uc694 \uc2dc\uc2a4\ud15c \uc124\uacc4 \ub3d9\uc778\uc744 \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. MEMS \uad00\uc131 \uc13c\uc11c\ub294 \uac70\uc2dc\uc801 \uad00\uc131 \uc13c\uc11c\uc640 \ub3d9\uc77c\ud55c \uc6d0\ub9ac\ub97c \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc791\uc740 \uc13c\uc11c \uc140\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc218 \ubbf8\ud130 \uae38\uc774\uc758 \ubb3c\uccb4\uc758 \ubbf8\uc138\ud55c \ubcc0\ud654\ub97c \uac10\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubbf8\uc138\ud55c \ubcc0\ud654\uc5d0\ub294 \ubb3c\uccb4\uc758 \uc704\uce58, \ubc29\ud5a5, \uac00\uc18d\ub3c4 \ub4f1\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n MEMS \uad00\uc131 \uc13c\uc11c\uc5d0\ub294 \ub450 \uac00\uc9c0 \uc8fc\uc694 \uc720\ud615\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ud558\ub098\ub294 \ud558\ub098 \uc774\uc0c1\uc758 \ucd95\uc5d0\uc11c \uc120\ud615 \uac00\uc18d\ub3c4\ub97c \uce21\uc815\ud560 \uc218 \uc788\ub294 \uac00\uc18d\ub3c4\uacc4\uc785\ub2c8\ub2e4. \uc0ac\ub78c\ub4e4\uc740 \uc885\uc885 \uc774 \uac00\uc18d\ub3c4\uacc4\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ub2e4\ub978 \ud558\ub098\ub294 \uac01\ub3c4 \uc6b4\ub3d9\uc744 \uce21\uc815\ud560 \uc218 \uc788\ub294 \uc790\uc774\ub85c\uc2a4\ucf54\ud504\uc785\ub2c8\ub2e4. \uc774\uac83\ub4e4 \uc13c\uc11c<\/a> \ubaa8\ub450 \ud2b9\uc815 \uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8\uc744 \uc704\ud574 \uc0ac\ub78c\ub4e4\uc774 \ub9cc\ub4e0 \uac83 \uac19\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uad00\uc131 \uc13c\uc11c\ub294 \ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c\uc758 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. <\/p>\n\n\n\n \uc774\ub7ec\ud55c \uc13c\uc11c\uc758 \ub300\uc5ed\ud3ed, \ud574\uc0c1\ub3c4 \ubc0f \ub3d9\uc801 \ubc94\uc704\ub294 \uc81c\ud488\uc5d0 \ub530\ub77c \ub2e4\ub985\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \uc790\ub3d9\ucc28 \uc5d0\uc5b4\ubc31 \ud574\uc81c \uc2dc\uc2a4\ud15c\uc740 \uad00\uc131 \uc13c\uc11c\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d\uc774 \ub9e4\uc6b0 \ub192\uc2b5\ub2c8\ub2e4. \uc774 \uc13c\uc11c\ub294 \ucd5c\ub300 0.5KHz\uc758 \ub300\uc5ed\ud3ed\uacfc 500mG \uc774\uc0c1\uc758 \ubd84\ud574\ub2a5\uc744 \uac00\uc838\uc57c \ud569\ub2c8\ub2e4. \ub3d9\uc801 \ubc94\uc704\ub294 \ub300\ub7b5 +\/-100G \uc774\ub0b4\uc5ec\uc57c \ud569\ub2c8\ub2e4. \ub2e4\ub978 \uc720\ud615\uc758 \uc7a5\ube44\ub294 \uc774\ub7ec\ud55c \ubc94\uc704\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d\uc774 \ub2e4\ub985\ub2c8\ub2e4. \uacf5\uae30 \ubbf8\uc138\uc911\ub825 \uce21\uc815 \uc7a5\ube44\uc5d0\ub294 0~10Hz\uc758 \uad11\ub300\uc5ed\uc744 \uac00\uc9c4 \uad00\uc131 \uc13c\uc11c\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ubd84\ud574\ub2a5\uc740 1\u00b5G \ubbf8\ub9cc\uc73c\ub85c \uc815\ud655\ud574\uc57c \ud558\uace0 \ub3d9\uc801 \ubc94\uc704\ub294 +\/-1G \ubbf8\ub9cc\uc774\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \ub2e4\uc74c\uc740 \ub0b4\ube44\uac8c\uc774\uc158 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc6a9 \uad00\uc131 \uc13c\uc11c \uae30\uc220\uc5d0 \ub300\ud55c PDF<\/a>.<\/strong><\/p>\n\n\n\n \uad00\uc131 \uc13c\uc11c\ub294 \ubaa8\ub4e0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ub610\ub294 \uc7a5\ube44\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \uc704\uce58\ub97c \ucc28\uc9c0\ud569\ub2c8\ub2e4.<\/strong> \uc774\ub294 \uc7a5\uce58 \ub610\ub294 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \ub354 \ud070 \uc81c\uc5b4 \uc2dc\uc2a4\ud15c\uc758 \uc77c\ubd80\uc785\ub2c8\ub2e4. \ubb3c\uccb4\uc758 \uac00\uc18d\ub3c4\ub098 \uac01\ub3c4 \ubaa8\uc158\ub9cc \uc54c\uace0 \uc788\ub2e4\uba74 \uc774 \uc815\ubcf4\ub294 \uadf8\ub2e4\uc9c0 \uc720\uc6a9\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc774 \uc13c\uc11c\uc5d0\uc11c \uc218\uc9d1\ub41c \uc815\ubcf4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc7a5\uce58\uc758 \ub3d9\uc791\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \ubb3c\ub860 \uc790\ub3d9\ucc28\uc758 \uc5d0\uc5b4\ubc31\uc744 \uc5ec\ub294 \uac83\uacfc \uac19\uc774 \uc561\ucd94\uc5d0\uc774\ud130\ub97c \ud65c\uc131\ud654\ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n \uac00\uc18d\ub3c4\uacc4 \uc13c\uc11c\ub294 \uac00\uc18d\ub3c4\uacc4\ub77c\uace0\ub3c4 \ud558\ub294 \uad00\uc131 \uc13c\uc11c\uc758 \uc911\uc694\ud55c \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/strong> \uc13c\uc11c\ub294 \ud558\ub098 \uc774\uc0c1\uc758 \ucd95\uc5d0\uc11c \uac00\uc18d\ub3c4 \uce21\uc815\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uac00\uc18d\ub3c4\uacc4\ub294 \uae30\uacc4\uc2dd \uc13c\uc11c \uc694\uc18c(\ud45c\uc900 \uc9c8\ub7c9 \ube14\ub85d)\uc640 \uac10\uc9c0 \ud68c\ub85c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \ud55c\ud3b8, \uac10\uc9c0 \uc694\uc18c\ub294 \uc8fc\ub85c \uae30\uacc4\uc2dd \uc11c\uc2a4\ud39c\uc158 \uc2dc\uc2a4\ud15c\uc5d0 \uc758\ud574 \uae30\uc900 \ud504\ub808\uc784\uc5d0 \uc5f0\uacb0\ub41c \uc9c8\ub7c9 \ube14\ub85d\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \uac10\uc9c0 \uc9c8\ub7c9\uc740 MEMS \uc13c\uc11c\uc5d0\uc11c \ub9e4\uc6b0 \uc791\uc740 \uc9c0\uc9c4 \uc9c8\ub7c9\uc785\ub2c8\ub2e4. \ubc18\uba74 \uae30\uacc4\uc2dd \uc11c\uc2a4\ud39c\uc158 \uc2dc\uc2a4\ud15c\uc740 \uace0\ud488\uc9c8 \uc2e4\ub9ac\ucf58 \uc2a4\ud504\ub9c1\uc73c\ub85c \uc81c\uc791\ub410\ub2e4.<\/p>\n\n\n\n \uc13c\uc11c\uac00 \uac00\uc18d\uc73c\ub85c \uc778\ud574 \uad00\uc131\ub825\uc744 \ubc1b\uc2b5\ub2c8\ub2e4. \uc774\uc81c \uac10\uc9c0 \uc9c8\ub7c9\uc774 \uc548\uc815\ub41c \uc704\uce58\uc5d0\uc11c \ubc97\uc5b4\ub098\uac8c \ub429\ub2c8\ub2e4. \ub274\ud134\uc758 \uc81c2 \uc6b4\ub3d9 \ubc95\uce59\uc774 \uc774\ub97c \uc798 \uc124\uba85\ud569\ub2c8\ub2e4. \ub77c\ud50c\ub77c\uc2a4 \ubc29\uc815\uc2dd\uc740 \uac00\uc18d\uc5d0 \ub300\ud55c \uc9c8\ub7c9 \ube14\ub85d\uc758 \ucc98\uc9d0\uc744 \ud45c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong><\/p>\n\n\n\n \uc774 \ubc29\uc815\uc2dd\uc5d0\uc11c \ub2e4\ub978 \ubb38\uc790\ub294 \ub2e4\ub978 \uac83\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. x\ub294 \uc9c8\ub7c9 \ube14\ub85d\uc758 \ubcc0\uc704\ub97c \ub098\ud0c0\ub0b4\uace0 a\ub294 \uac00\uc18d\ub3c4\uc785\ub2c8\ub2e4. s\ub294 Laplace \uc5f0\uc0b0\uc790\ub97c \ub098\ud0c0\ub0b4\uace0 b\ub294 \uac10\uc1e0 \uacc4\uc218\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. m\uc740 \uc9c8\ub7c9 \ube14\ub85d\uc758 \uc9c8\ub7c9\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. k\ub294 \uc11c\uc2a4\ud39c\uc158 \uc2dc\uc2a4\ud15c\uc758 \uae30\uacc4\uc801 \uc2a4\ud504\ub9c1 \uc0c1\uc218\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n \uc13c\uc11c\uc758 \uacf5\uc9c4 \uc8fc\ud30c\uc218\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \ud45c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong><\/p>\n\n\n\n \ud488\uc9c8 \uacc4\uc218 \ubc29\uc815\uc2dd\uc740 \ub2e4\uc74c\uacfc \uac19\uc774 \ud45c\ud604\ub429\ub2c8\ub2e4.<\/strong><\/p>\n\n\n\n \uc13c\uc11c\uc758 \uac10\ub3c4(\uac1c\ubc29 \ub8e8\ud504\uc5d0\uc11c)\ub294 \ub2e4\uc74c\uacfc \uac19\uc774 \ud45c\ud604\ub429\ub2c8\ub2e4.<\/strong><\/p>\n\n\n\n \uc704\uc758 \uc54c\uace0\ub9ac\uc998\uc5d0\uc11c \uaddc\uce59\uc744 \ubcfc \uc218 \uc788\uc74c\uc740 \ubd84\uba85\ud569\ub2c8\ub2e4. \uac10\ub3c4\ub97c \ub192\uc774\uac70\ub098 \ub0ae\ucd94\uba74 \ud56d\ubaa9\uc758 \uacf5\uc9c4 \uc8fc\ud30c\uc218\uac00 \ubcc0\uacbd\ub429\ub2c8\ub2e4. <\/strong>\ud3d0\uc1c4\ud615 \ub8e8\ud504 \uc2dc\uc2a4\ud15c\uc744 \uc0ac\uc6a9\ud558\uba74 \uc0ac\ub78c\ub4e4\uc774 \uc774 \ud2b8\ub808\uc774\ub4dc \uc624\ud504\ub97c \uc790\uc720\ub86d\uac8c \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac10\uc1e0 \uacc4\uc218\ub294 \uac00\uc18d\ub3c4\uacc4\uc758 \ucd5c\ub300 \ub300\uc5ed\ud3ed\uc744 \uacb0\uc815\ud569\ub2c8\ub2e4. \ub310\ud551 \ud329\ud130\ub294 \uc77c\ubc18\uc801\uc73c\ub85c MEMS \uac00\uc18d\ub3c4\uacc4\uc5d0\uc11c \uac00\ubcc0\uc801\uc785\ub2c8\ub2e4. \uc774 \uacc4\uc218\ub294 \uac10\uc9c0\ub41c \uc9c8\ub7c9\uc758 \ubcc0\uc704\uc640 \ud568\uaed8 \uc99d\uac00\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \uc9c8\ub7c9 \ube14\ub85d\uc758 \ubcc0\uc704\ub294 \ubaa8\ub4e0 \ub9c8\uc774\ud06c\ub85c \uae30\uacc4 \uac00\uc18d\ub3c4\uacc4\uc5d0\uc11c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0ac\ub78c\ub4e4\uc740 \uc704\uce58 \uce21\uc815 \uc778\ud130\ud398\uc774\uc2a4\ub97c \ud1b5\ud574 \uc774 \ubcc0\uc704 \uac70\ub9ac\ub97c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uce21\uc815 \ubc29\ubc95\uc740 \uce90\ud328\uc2dc\ud134\uc2a4 \uce21\uc815\uacfc \ub3d9\uc77c\ud569\ub2c8\ub2e4. \ub9e4\uc2a4 \ube14\ub85d\uc5d0 \ubd80\ucc29\ub41c \uac00\ub3d9\ud310\uc740 \uace0\uc815 \uc6a9\ub7c9\uc131 \uc804\uadf9 \uc0ac\uc774\ub97c \uc774\ub3d9\ud569\ub2c8\ub2e4. \uac00\uc18d\ub3c4\uacc4 \uc124\uacc4\uc5d0\ub294 \uc5ec\ub7ec \uac00\uc9c0 \uc720\ud615\uc758 \uac10\uc9c0 \uba54\ucee4\ub2c8\uc998\uc774 \uc801\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uac10\uc9c0 \ubc29\ubc95\uc5d0\ub294 \uc555\uc804 \uc800\ud56d, \uc555\uc804, \uc6a9\ub7c9\uc131, \uad11\ud559 \ubc0f \ud130\ub110\ub9c1 \uc804\ub958\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n \uac00\uc18d\ub3c4\uacc4\ub294 \uac1c\ubc29\ud615 \ub8e8\ud504 \ub610\ub294 \ud3d0\uc1c4\ud615 \ub8e8\ud504 \uc2dc\uc2a4\ud15c\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uac1c\ubc29\ud615 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\ub294 \uc704\uce58 \uce21\uc815 \uc778\ud130\ud398\uc774\uc2a4\uc758 \uc804\uae30 \uc2e0\ud638\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \uac00\uc18d\ub3c4\uacc4\ub294 \uc804\uae30 \uc2e0\ud638\ub97c \ucd9c\ub825 \uc2e0\ud638\ub85c \ubcc0\ud658\ud569\ub2c8\ub2e4. \uac1c\ubc29\ud615 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\ub294 \uad6c\ucd95\ud558\uae30 \uc27d\uae30 \ub54c\ubb38\uc5d0 \ub300\ubd80\ubd84\uc758 \uc0ac\ub78c\ub4e4\uc774 \uac1c\ubc29\ud615 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uac1c\ubc29\ud615 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\ub294 \ub192\uc740 \ud5c8\uc6a9 \uc624\ucc28\ub97c \uac00\uc9c0\uace0 \uad00\ub9ac\ud574\uc57c \ud55c\ub2e4\ub294 \ub2e8\uc810\ub3c4 \uc788\uc2b5\ub2c8\ub2e4. \uac10\uc1e0 \uacc4\uc218\ub294 \uac00\uc18d\ub3c4\uacc4\uc5d0 \uac00\ubcc0 \uc2a4\ud504\ub9c1 \uc0c1\uc218\uac00 \uc788\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uac1c\ubc29\ud615 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\uc758 \uc9c8\ub7c9 \ubcc0\uc704\ub3c4 \ube44\uc120\ud615\uc131 \uac80\uc0ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \ud3d0\uc1c4 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4\ub294 \uac10\uc9c0\ub41c \uc9c8\ub7c9\uc774 \uc815\uc9c0 \uc704\uce58\ub85c \ub3cc\uc544\uac08 \uc218 \uc788\ub3c4\ub85d \ud569\ub2c8\ub2e4. \uc9c8\ub7c9\uc5d0 \uc758\ud574 \uac00\ud574\uc9c0\ub294 \ud53c\ub4dc\ubc31 \ud798\uc744 \ucd94\uc801\ud558\ub824\ub294 \ud53c\ub4dc\ubc31 \uc2dc\uc2a4\ud15c\uc5d0 \uc758\uc874\ud569\ub2c8\ub2e4. \uc774 \ud53c\ub4dc\ubc31 \ud798\uc740 \ud3d0\uc1c4 \ub8e8\ud504 \uac00\uc18d\ub3c4\uacc4 \uac00\uc18d\ub3c4\uc5d0 \ube44\ub840\ud569\ub2c8\ub2e4. \ud53c\ub4dc\ubc31 \ud798\uc740 \ube44\uc120\ud615\uc131\uc73c\ub85c \uc0c1\uc1c4\ub418\uace0 \uac10\ub3c4\ub294 \ud53c\ub4dc\ubc31 \uc81c\uc5b4\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \ud53c\ub4dc\ubc31 \uc2e0\ud638\ub294 \uc804\uae30 \uc2e0\ud638 \ucee8\ud2b8\ub864\ub7ec\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc13c\uc11c\uc758 \uc5ed\ud559\uc744 \uc81c\uc5b4\ud558\ub294 \ub370\uc5d0\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc815\uc804\uae30, \uc5f4 \ub610\ub294 \uc790\uae30\ub825\uc5d0 \uc758\ud574 \uad6c\ub3d9\ub418\uc5b4 \ud14c\uc2a4\ud2b8 \uc9c8\ub7c9\uc744 \uc815\uc9c0 \uc704\uce58\ub85c \ub418\ub3cc\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0ac\ub78c\ub4e4\uc740 \uc885\uc885 \ud53c\ub4dc\ubc31 \uc2e0\ud638\ub97c \uc544\ub0a0\ub85c\uadf8 \ub610\ub294 \ub514\uc9c0\ud138 \ud615\uc2dd\uc73c\ub85c \ud45c\uc2dc\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubaa8\ub4e0 \ub514\uc790\uc778\uc740 \uc13c\uc11c\uc758 \ubcf5\uc7a1\uc131\uc744 \ub354\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \ub9ce\uc740 \uc720\ud615\uc758 \uac00\uc18d\ub3c4\uacc4\uac00 \uc788\uc73c\uba70 \ub2e4\uc74c\uc740 \uac00\uc18d\ub3c4 \uac10\uc9c0\uc758 \uba87 \uac00\uc9c0 \uc77c\ubc18\uc801\uc778 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n \uc790\uc774\ub85c\uc2a4\ucf54\ud504\ub77c\uace0\ub3c4 \ud558\ub294 \uac01\uc18d\ub3c4 \uc13c\uc11c\ub294 \ubb3c\uccb4\uc758 \ud68c\uc804\uc744 \uce21\uc815\ud558\ub3c4\ub85d \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/strong> MEMS \uc790\uc774\ub85c\uc2a4\ucf54\ud504\ub294 \uc8fc\ub85c \ucf54\ub9ac\uc62c\ub9ac \uc6d0\ub9ac\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ub450 \uac00\uc9c0 \ud798\uc774 \ud68c\uc804 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc6c0\uc9c1\uc774\ub294 \uc9c8\ub7c9\uc744 \ubc29\ud574\ud569\ub2c8\ub2e4. \uc774 \ub450 \uac00\uc9c0 \ud798\uc740 \ud68c\uc804\ucd95\uc5d0 \uc218\uc9c1\uc778 \ud798\uacfc \uc6b4\ub3d9 \ubc29\ud5a5\uc758 \ud798\uc785\ub2c8\ub2e4. \uae30\uacc4\uc801 \uba54\ucee4\ub2c8\uc998\uc740 \uc77c\ubc18\uc801\uc73c\ub85c MEMS \uc790\uc774\ub85c\uc2a4\ucf54\ud504\ub97c \uad6c\uc131\ud569\ub2c8\ub2e4. \uc774 \uae30\uacc4\uc801 \uad6c\uc870\ub294 \ucf54\ub9ac\uc62c\ub9ac \ud798\uc5d0 \uc758\ud574 \uacf5\uc9c4\ub429\ub2c8\ub2e4. \ub3d9\uc77c\ud55c \ub610\ub294 2\ucc28 \uad6c\uc870\uc5d0\uc11c 2\ucc28 \uc9c4\ub3d9\uc744 \uc5ec\uae30\uc2dc\ud0b5\ub2c8\ub2e4. \ubb3c\ub860 \ucf54\ub9ac\uc62c\ub9ac \ud798\uc740 \uad6c\ub3d9\ub825\ubcf4\ub2e4 \uc791\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ubaa8\ub4e0 MEMS \uc790\uc774\ub85c\uc2a4\ucf54\ud504\ub294 \uc9c4\ub3d9 \uad6c\uc870\uc5d0\uc11c \uc804\ud5a5\ub825 \ud604\uc0c1\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \ub0b4\ubd80 \ud504\ub808\uc784\uc758 \uc9c8\ub7c9 \ube14\ub85d\uc5d0 \uc5f0\uacb0\ub41c \ud55c \uc30d\uc758 \uc2a4\ud504\ub9c1\uc774 \uc9c4\ub3d9 \uad6c\uc870\ub97c \ud615\uc131\ud569\ub2c8\ub2e4. \ub0b4\ubd80 \ubc0f \uc678\ubd80 \ud504\ub808\uc784\uc740 \ub610 \ub2e4\ub978 \uc9c1\uad50 \uc2a4\ud504\ub9c1 \uc138\ud2b8\ub85c \uc5f0\uacb0\ub429\ub2c8\ub2e4. \ub0b4\ubd80 \ud504\ub808\uc784\uacfc \uc678\ubd80 \ud504\ub808\uc784 \uc0ac\uc774\uc5d0 \uc815\uc804 \uc6a9\ub7c9\uc5d0 \ubbfc\uac10\ud55c \uc190\uac00\ub77d\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ucee4\ud328\uc2dc\ud134\uc2a4 \uac10\uc9c0 \ud551\uac70\ub3c4 \uc9c1\uad50 \uc2a4\ud504\ub9c1\uc744 \ub530\ub77c \uc5f0\uacb0\ub429\ub2c8\ub2e4. \ucf54\ub9ac\uc62c\ub9ac \ud798\uc740 \ubb3c\uccb4\uc758 \uc18d\ub3c4\uac00 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \ud68c\uc804\ud558\ub294 \ubb3c\uccb4\uc758 \uac01\uc18d\ub3c4\uc640 \ud568\uaed8 \uc99d\uac00\ud569\ub2c8\ub2e4. \ub610\ud55c \ud68c\uc804\ucd95\uc744 \ud5a5\ud558\uac70\ub098 \ud68c\uc804\ucd95\uc5d0\uc11c \uba40\uc5b4\uc9d1\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \uac80\uc0ac \uc9c8\ub7c9\uc740 \ub0b4\ubd80 \uc2a4\ud504\ub9c1\uc744 \ud1b5\ud574 \uc5f0\uc18d\uc801\uc73c\ub85c \uc815\ud604\ud30c\ub85c \uad6c\ub3d9\ub429\ub2c8\ub2e4. \uacf5\uc9c4 \ud14c\uc2a4\ud2b8 \uc9c8\ub7c9\uc740 \uc2dc\uc2a4\ud15c\uc774 \ud68c\uc804\ud560 \ub54c \ucf54\ub9ac\uc62c\ub9ac \ud798\uc744 \ubc1b\uac8c \ub429\ub2c8\ub2e4. \uc9c8\ub7c9\uc740 \ub0b4\ubd80 \ud504\ub808\uc784\uacfc \uc678\ubd80 \ud504\ub808\uc784 \uc0ac\uc774\uc758 \uc9c1\uad50 \uc2a4\ud504\ub9c1\uc5d0 \uc758\ud574 \uc774 \ud798\uc744 \ubc1b\uac8c \ub429\ub2c8\ub2e4. \uc774 \ud798\uc774 \uadf8\uac83\uc744 \ubcc0\ud654\uc2dc\ud0ac \uac83\uc785\ub2c8\ub2e4. \uc774 \ud798\uc740 \uc815\uc804\uc2dd \uac10\uc9c0 \ud551\uac70 \uc0ac\uc774\uc758 \uac70\ub9ac\ub97c \ubcc0\uacbd\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \uac01\uc18d\ub3c4 \uc13c\uc11c\ub294 \ud574\ub2f9 \uc804\uae30 \uc2e0\ud638\ub97c \ub3d9\uc2dc\uc5d0 \ucd9c\ub825\ud569\ub2c8\ub2e4. \uc774 \uc2e0\ud638\ub294 \ucf54\ub9ac\uc62c\ub9ac \ud798\uc5d0 \ube44\ub840\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n \ub2e4\ub978 \uac01\uc18d\ub3c4 \uc13c\uc11c \ud558\uc704 \uc9d1\ud569\uc758 \uc815\ud655\ub3c4 \ubc94\uc704\ub294 \ud3b8\ucc28\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uac01\uc18d\ub3c4 \uc13c\uc11c\uc758 \uc77c\ubc18\uc801\uc778 \uc720\ud615\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n \uad00\uc131 \uc13c\uc11c\ub294 \ub2e4\uc591\ud55c \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\uc804\uc5d0\ub294 \uad00\uc131 \uc13c\uc11c\uac00 \uc77c\ubc18\uc801\uc73c\ub85c \uad70\uc0ac \ubc0f \ud56d\uacf5 \uc6b0\uc8fc \uc751\uc6a9 \ubd84\uc57c\ub85c \uc81c\ud55c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. MEMS \uad00\uc131 \uc13c\uc11c\uc758 \uae09\uc18d\ud55c \uac1c\ubc1c\uc740 \ub354 \ub9ce\uc740 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uac00\ub2a5\ud574\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\uac83\uc740 \uc790\ub3d9\ucc28 \ubc0f \ub2e4\uc591\ud55c \uc18c\ube44\uc790 \uac00\uc804 \ubd84\uc57c\uc5d0\uc11c \ub9e4\uc6b0 \uc778\uae30\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n \uc0ac\ub78c\ub4e4\uc740 \uc790\ub3d9\ucc28 \uc0b0\uc5c5\uc5d0\uc11c \uc790\ub3d9\ucc28 \uc5d0\uc5b4\ubc31\uacfc \uc548\uc804\ubca8\ud2b8\uc5d0 \uac00\uc18d\ub3c4\uacc4\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \uc790\uc774\ub85c\uc2a4\ucf54\ud504\ub294 \uc804\ubcf5 \ubc29\uc9c0 \ubcf4\ud638 \ubc0f \uc790\ub3d9 \ud45c\uc2dc\uae30\uc640 \uac19\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n \uc18c\ube44\uc790 \uac00\uc804 \ubd84\uc57c\ub294 \uadf8 \uc801\uc6a9 \ubc94\uc704\uac00 \ub9e4\uc6b0 \ub113\uc2b5\ub2c8\ub2e4. \uce74\uba54\ub77c, \uac00\uc0c1\ud604\uc2e4 \ud5e4\ub4dc\uc14b, \uc2a4\ub9c8\ud2b8 \uc7a5\ub09c\uac10, \uac8c\uc784\uc6a9 \ud0a4\ubcf4\ub4dc \ub4f1\uc5d0 \uad00\uc131 \uc13c\uc11c\ub97c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc6b0\ub9ac\uac00 \uc77c\uc0c1\uc5d0\uc11c \uc0ac\uc6a9\ud558\ub294 \uc2a4\ub9c8\ud2b8\ud3f0\uacfc \ud0dc\ube14\ub9bf\uc5d0\ub294 \uad00\uc131 \uc13c\uc11c \uc2dc\uc2a4\ud15c\uc774 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uc8fc\ub85c \ud654\uba74 \ud68c\uc804\uacfc \uac8c\uc784\uc744 \uac10\uc9c0\ud558\uace0 \uc0ac\uc6a9\uc790\uc758 \ud604\uc2e4\uac10 \uc788\ub294 \uacbd\ud5d8\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n \ub610\ud55c \uc0ac\uc6a9\uc790\uac00 \ub85c\ubd07 \uc870\uc791\uae30 \ubc0f \ubb34\uc778 \ub85c\ubd07 \ucc28\ub7c9\uc758 \uc704\uce58\uc640 \ubc29\ud5a5\uc744 \ud655\uc778\ud558\ub294 \ub370 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub3c4\ub85d \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc13c\uc11c\ub294 \uc758\ub8cc \ubd84\uc57c\uc5d0\uc11c\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc758\uc0ac\uc5d0\uac8c \ub3c4\uc6c0\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud658\uc790 \ucd94\uc801<\/a> \ud2b9\uc815 \uc9c8\ubcd1\uc744 \uc553\uace0 \uc788\ub294 \ud658\uc790. \uc608\ub97c \ub4e4\uc5b4 \ud30c\ud0a8\uc2a8\ubcd1 \ud658\uc790\ub97c \ubaa8\ub2c8\ud130\ub9c1\ud558\ub294 \uac83\uc774 \uadf8 \uc608\uc785\ub2c8\ub2e4. \uace0\uc815\ubc00 \uad00\uc131 \uc13c\uc11c\ub294 \uc8fc\ub85c \uad70\uc0ac \ubc0f \ud56d\uacf5\uc6b0\uc8fc \ubd84\uc57c\uc5d0\uc11c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc2a4\ub9c8\ud2b8 \uad70\uc218\ud488, \ucda9\ub3cc \uac10\uc9c0, \ube44\ud589\uae30\/\ubbf8\uc0ac\uc77c \ube44\ud589 \uc81c\uc5b4 \ub4f1\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n\uad00\uc131 \uc13c\uc11c\ub780 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n\n\n\n
\uad00\uc131 \uc13c\uc11c \uc5b4\uc148\ube14\ub9ac<\/h2>\n\n\n\n
\uac00\uc18d\ub3c4\uacc4 \uc13c\uc11c<\/a><\/h3>\n\n\n

X \/ a = 1 \/ (s 2 + b \/ m + s \u00d7 k \/ m)<\/code><\/pre>\n\n\n\nfn = \u221a\uffe3(k\/m)<\/code><\/pre>\n\n\n\nQ = \u221a\uffe3 (m \u00d7 k) \/ b<\/code><\/pre>\n\n\n\n\uc5d0\uc2a4 = \uc5e0 \/ \ucf00\uc774<\/code><\/pre>\n\n\n\n\uac01\uc18d\ub3c4 \uc13c\uc11c<\/a><\/h3>\n\n\n

\uad00\uc131 \uc13c\uc11c \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n\n\n
